Charged beam device

A charged beam device comprising:

• a charged beam generator;
• a deflection control portion which allows a charged beam generated by the charged beam generator to scan;
• a focus control portion and an astigmatism correction portion for the charged beam;
• and
• an image processing portion which processes an image of surface information of a sample when irradiating the charged beam onto the sample, wherein
• there is further provided a switch portion which switches scan conditions for the charged beam when obtaining pattern information of the sample surface and scan conditions for the charged beam when performing both or either of focus correction and astigmatism correction, and a scan line interval in the scan conditions for the charged beam when performing both or either of the focus correction and the astigmatism correction is set in such a manner that scanning is performed at the integral multiple (excluding 1) of the scan line interval for scanning, and then the scanning is performed by returning to a skipped position for scanning.

A charged beam device comprising:

• a charged beam generator;
• a deflection control portion which allows a charged beam generated by the charged beam generator to scan;
• a focus control portion and an astigmatism correction portion for the charged beam;
• and
• an image processing portion which processes an image of surface information of a sample when irradiating the charged beam onto the sample, wherein
• there is further provided a switch portion which switches scan conditions for the charged beam when obtaining pattern information of the sample surface and scan conditions for the charged beam when performing both or either of focus correction and astigmatism correction, a scan speed in the scan conditions for the charged beam when performing both or either of the focus correction and the astigmatism correction is set at a value larger than that in the scan conditions for the charged beam when obtaining the pattern information of the sample surface, and a scan line interval in the scan conditions for the charged beam when performing both or either of the focus correction and the astigmatism correction is set in such a manner that scanning is performed at the integral multiple (excluding 1) of the scan line interval for scanning, and then the scanning is performed by returning to a skipped position for scanning.