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US 8,477,983 B2Granted
Multi-microphone system
AssigneeAnalog Devices, Inc.
InventorsJason W. Weigold, Kieran P. Harney
Life of this patent
Estimating the term…
Abstract
A microphone system implements multiple microphones on a single base. To that end, the microphone system has a base, and a plurality of substantially independently movable diaphragms secured to the base. Each of the plurality of diaphragms forms a variable capacitance with the base and thus, each diaphragm effectively forms a generally independent, separate microphone with the base.
Claims23
A microphone system comprising:
- a base having a single, conductive backplate;
- and
- a plurality of substantially independently movable diaphragms secured to the base, each of the plurality of diaphragms forming a corresponding plurality of variable capacitance with the single backplate such that the backplate forms a common electrode for each of the plurality of diaphragms, each diaphragm forming a separate microphone with the single backplate.
A MEMS microphone system comprising:
- a single, conductive backplate;
- a plurality of substantially independently movable diaphragms, each diaphragm forming a variable capacitance with the single, conductive backplate such that the backplate forms a common electrode for each of the plurality of diaphragms, each diaphragm forming a microphone with the backplate;
- and
- a package, the package having an aperture to permit the ingress of audio signals, and the package containing the backplate and the plurality of substantially independently movable diaphragms.
1 more element
A MEMS microphone system comprising:
- a generally rigid support means having a single, conductive backplate;
- a plurality of substantially independently movable, flexible diaphragms, each diaphragm forming a variable capacitance with the single backplate such that the backplate forms a common electrode for each of the plurality of diaphragms, each diaphragm forming an individual microphone with the single backplate;
- and
- a package, the package having an aperture to permit the ingress of audio signals, and the package containing the backplate and the plurality of substantially independently movable flexible diaphragms.
1 more element
Dependencies are inferred from the claim text.