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US 8,477,817 B1Granted
Distributed feedback laser having enhanced etch stop features
AssigneeFinisar Corporation
InventorsAshish K. Verma, Tsurugi Sudo, Sumesh Mani K. Thiyagarajan, David Bruce Young
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Abstract
In one example embodiment, a DFB laser includes a substrate, an active region positioned above the substrate, and a grating layer positioned above the active region. The grating layer includes a portion that serves as a primary etch stop layer. The DFB laser also includes a secondary etch stop layer located either above or below the grating layer, and a spacer layer interposed between the grating layer and the active region.
Claims5
A distributed feedback (DFB) laser, comprising:
- a substrate;
- an active region positioned above the substrate;
- a grating layer positioned above the active region, the grating layer including a portion that serves as a primary etch stop layer;
- a secondary etch stop layer located below the grating layer so as to be interposed between the grating layer and the active region;
- and
- a spacer layer interposed between the secondary etch stop layer and the active region.
3 more elements
Dependencies are inferred from the claim text.