Capacitor structure

A capacitor structure over a substrate, comprising:

• a plurality of conductive line levels located over the substrate, each of the conductive line levels comprising a first conductive line and a second conductive line, wherein the first conductive lines in the conductive line levels form a first conductive line co-plane and the second conductive lines in the conductive line levels form a second conductive line co-plane;
• a first conductive end electrically connected to the first conductive lines on the conductive line levels;
• a second conductive end electrically connected to the second conductive lines on the conductive line levels;
• and
• a plurality of vias located between the neighboring conductive line levels, wherein the vias on each of the first conductive line co-plane and the second conductive line co-plane are staggeredly arranged;
• wherein the conductive line levels includes at least five consecutively stacked conductive line levels having a first conductive line level, a second conductive line level, a third conductive line level, a fourth conductive line level and a fifth conductive line level, and when the first conductive line level is connected to the second conductive line level through the vias on the first conductive line co-plane, the second conductive line level is connected to the third conductive line level through the vias on the second conductive line co-plane.