Position measuring arrangement
AssigneeDr. Johannes Heidenhain GmbH
InventorsFlorian Schindler, Robert Kraus, Joel Heersink, Michael Stepputat
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AssigneeDr. Johannes Heidenhain GmbH
InventorsFlorian Schindler, Robert Kraus, Joel Heersink, Michael Stepputat
Estimating the term…
A position measuring arrangement that includes a retroreflector, a light source generating a lightbeam and a scanning unit that generates a partially-divergent lightbeam. The scanning unit includes a scanning mirror mounted so it is deflected in a reproducible manner so that a grid-like scanning of a two-dimensional spatial area by the partially-divergent lightbeam takes place over a plurality of scanning tracks. The position measuring arrangement including an interferometric distance measuring unit that includes a beam splitter element that splits the lightbeam generated by the light source so that split lightbeams pass through a reference arm and a measuring arm at least once in each direction. The interferometric distance measuring unit includes an opto-electronic detector unit, through which a detection of distance-dependent signals from superimposed lightbeams from the reference arm and the measuring arm takes place.
A position measuring arrangement for determining the position of a spatial point, the position measuring arrangement comprising:
Dependencies are inferred from the claim text.