Method and system for inspecting beveled objects
AssigneeCamtek Ltd.
InventorZehava Ben-Ezer
Life of this patent
Estimating the term…
Abstract
An inspection system and a method. The method may include: illuminating the object with impinging light of a first polarization; performing a polarization based filtering of (a) multiple-reflected light signals, each multiple-reflected light signal being reflected from at least two different bevel side surfaces of the object, and (b) additional light signals, each additional light signal being reflected from a single element of the object, such as to suppress the multiple-reflected light signals, and to provide polarization based filtered light signals; and detecting the polarization based filtered light signals.
Claims30
A method, comprising:
- illuminating the object with impinging light of a first polarization;
- performing a polarization based filtering of (a) multiple-reflected light signals, each multiple-reflected light signal being reflected from at least two different bevel side surfaces of the object, and (b) additional light signals, each additional light signal being reflected from a single element of the object, such as to suppress the multiple-reflected light signals, and to provide polarization based filtered light signals;
- and
- detecting the polarization based filtered light signals.
An inspection system, comprising:
- optics, arranged to:
- illuminate the object with impinging light of a first polarization;
- and
- perform a polarization based filtering of (a) multiple-reflected light signals, each multiple-reflected light signal being reflected from at least two different bevel side surfaces of the object, and (b) additional light signals, each additional light signal being reflected from a single element of the object, such as to suppress the multiple-reflected light signals, and to provide polarization based filtered light signals;
- and
- a sensor for detecting the polarization based filtered light signals.
Dependencies are inferred from the claim text.