Digital exposure method and digital exposure device for performing the method

A digital exposure device comprising:

• an exposure head comprising an exposure source and a digital micromirror device, the digital micromirror device reflecting an exposure beam received from said exposure source to a substrate to scan said exposure beam onto the substrate;
• and
• a system control part comprising:
• a file producing part for producing a graphic data system file respectively corresponding to each of a plurality of patterns to be formed on a substrate, including a first graphic data system file corresponding to a first pattern of the plurality of patterns for exposing a first area of the substrate, and a second graphic data system file corresponding to a second pattern of the plurality of patterns for exposing a second area of the substrate, and combining the first graphic data system file and the second graphic data system file into a combined graphic data system file, wherein a plurality of first layers of the first pattern and a plurality of second layers of the second pattern are respectively combined into one layer, wherein the second layers respectively correspond to the first layers, in combining the first graphic data system file and the second graphic data system file;
• a data outputting part for generating digital micromirror device on/off data from the graphic data system files to control on/off timing of the digital micromirror device;
• and
• a transfer control part for outputting a transfer signal which transfers a stage for exposing the substrate.