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US 8,476,994 B2Granted
Electromechanical switch and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsDong-chul Kim, Ran-ju Jung, Sun-ae Seo, Chang-won Lee, Hyun-jong Chung
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Abstract
Provided is an electromechanical switch and a method of manufacturing the same. The electromechanical switch includes an elastic conductive layer that moves by the application of an electric field, wherein the elastic conductive layer includes at least one layer of graphene.
Claims21
An electromechanical switch comprising:
- a substrate;
- a supporter formed on a first region of the substrate;
- a gate electrode and a drain electrode which are formed on a second region and third region of the substrate, respectively;
- an elastic conductive layer formed on the supporter, a first end of which is supported by the supporter and a second end of which is separated from the gate electrode and the drain electrode, the elastic conductive layer being configured to move by the application of an electric field, the elastic conductive layer including at least one plate type graphene layer without a resin;
- and
- a source electrode formed on the supporter to cover the first end of the elastic conductive laver.
3 more elements
A method of manufacturing an electromechanical switch, comprising:
- providing a substrate;
- forming a supporter on a first region of the substrate;
- forming a gate electrode and a drain electrode on a second region and a third region of the substrate, respectively, wherein the gate electrode and drain electrode are separated from each other;
- forming an elastic conductive layer having a line shape on the supporter, a first end of which is supported by the supporter, a second end of which is separated from the gate electrode and the drain electrode, and the elastic conductive layer comprises at least one plate type graphene layer without a resin;
- and
- forming a source electrode on the supporter, covering the first end of the elastic conductive layer.
3 more elements
An electromechanical switch comprising:
- an elastic conductive layer that moves by the application of an electric field, wherein the elastic conductive layer includes at least one plate type graphene layer without a resin;
- and
- a substrate below the elastic conductive layer, the substrate having an upper surface that is planar and faces the elastic conductive layer,
- wherein the elastic conductive layer has a bottom surface that is planar and faces the upper surface of the substrate, and
- wherein the elastic conductive layer has a uniform thickness.
2 more elements
Dependencies are inferred from the claim text.