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US 8,476,990 B2Granted
MEMS resonator devices
AssigneeInfineon Technologies AG
InventorsBernhard Winkler, Mohsin Nawaz, Florian Schoen
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Abstract
Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
Claims29
A MEMS resonating device comprising:
- a resonator element configured to provide timing and having a frequency range of about 10 megahertz (MHz) to about 80 MHz;
- and
- at least one passive temperature compensation structure arranged on the resonator element, wherein the MEMS resonating device has a thermal coefficient of frequency in a range of about −500 parts per million (ppm) to about 0 in a temperature range of about −30 degrees Celsius (C) to about 130 degrees C.,
- wherein the MEMS resonating device is configured to provide both longitudinal resonance and flexural vibrations.
1 more element
The MEMS resonating device of clam 1, wherein the MEMS resonating device is configured to provide the longitudinal resonance and the flexural vibrations simultaneously.
A MEMS resonating device comprising:
- a resonator element configured to resonate at a frequency of at least about 10 megahertz (MHz);
- and
- a passive frequency compensation structure arranged on the resonator element, wherein the MEMS resonating device has a thermal coefficient of frequency in a range of about −500 parts per million (ppm) to about 0 in a temperature range of about −30 degrees Celsius (C) to about 130 degrees C.,
- wherein the MEMS resonating device is configured to provide both longitudinal resonance and flexural vibrations.
1 more element
Dependencies are inferred from the claim text.