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US 8,476,918 B2Granted
Apparatus and method for wafer level classification of light emitting device
AssigneeTSMC Solid State Lighting Ltd.
InventorHsin-Chieh Huang
Life of this patent
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Abstract
The present disclosure provides a semiconductor test system. The semiconductor test system includes a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs); a probe test card operable to test each test field of the wafer; and a light detector integrated with the probe test card to collect light from a LED of the wafer.
Claims20
A semiconductor test system, comprising:
- a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs);
- a probe test card operable to test each test field of the wafer;
- and
- a light detector secured on the probe test card to collect light from a LED of the wafer and operable to move with the probe test card with respect to the wafer stage.
1 more element
A method, comprising:
- providing a semiconductor test system for testing a wafer, wherein the semiconductor test system includes:
- a wafer stage to hold a wafer;
- a probe test card operable to test each test field of the wafer;
- and
- a light detector integrated with the probe test card to collect light from the wafer;
- providing a wafer having a plurality of light emitting devices (LEDs) to the wafer stage;
- testing a die of a test field on the wafer using the light detector for optical and electrical performance of the die;
- and
- classifying the die into a bin according to the optical and electrical performance of the die.
6 more elements
A semiconductor test system, comprising:
- a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs);
- a probe test card operable to test each test field of the wafer;
- and
- a light detector integrated with the probe test card to collect light from a LED of the wafer, wherein the light detector is integrated with the probe test card and is configured to move relative to the probe test card.
1 more element
Dependencies are inferred from the claim text.