Rigid dual-servo nano stage
AssigneeKorea Institute of Industrial Technology
InventorsEun Goo Kang, Young Jae Choi, Seok Woo Lee, Sang Moo Lee, Kyung Tae Nam, Sang Hoon Ji
Life of this patent
Estimating the term…
Abstract
The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.
Claims10
A stage comprising:
- a work table on which a working object is placed;
- a motor configured to provide a rotational force;
- a first shaft rotated by the motor to transfer the work table;
- at least two bearing housings located at both ends of the first shaft;
- a linear moving part located between the motor and first bearing housing and configured to be elastically expandable to linearly move the first shaft in an axial direction of the first shaft, the linear moving part having a hollow to insert an end of the first shaft therein, the hollow located within the linear moving part;
- and
- an expanding part configured to be elastically expandable as far as the first shaft is moved by the linear moving part, the expanding part located within the linear moving part,
- wherein the expanding part includes:
- one end of a second shaft, directly connected to the motor and driven by the motor, the other end of the second shaft having a portion directly inserted into the end of the first shaft;
- and
- a key provided between an inner surface of the first shaft and an outer surface of the second shaft to allow the first shaft to move along the axial direction of the first shaft with respect to the second shaft while preventing the first shaft from rotating in a rotational direction thereof with respect to the second shaft.
Dependencies are inferred from the claim text.