Piezoelectric/electrostrictive element having a specific coverage area of electrode on substrate, and manufacturing method of the same
AssigneeNGK Insulators, Ltd.
InventorsTakao Ohnishi, Yuhji Umeda, Naoki Goto
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Abstract
There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element comprising a substrate, a lower electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the lower electrode layer, and the coverage of the lower electrode layer with respect to the substrate is 98% or less.
Claims6
A piezoelectric/electrostrictive element comprising a substrate, an electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the electrode layer,
- wherein the electrode layer and voids are uniformly present between the piezoelectric/electrostrictive layer and the substrate, and
- wherein the coverage of the electrode layer with respect to the substrate is 98% or less.
A manufacturing method of a piezoelectric/electrostrictive element, comprising:
- a first layer forming step of forming a first layer containing a metal on a substrate;
- a second layer forming step of forming a second layer containing a piezoelectric/electrostrictive material on the first layer formed by the first layer forming step;
- a firing step of heating and firing the substrate on which the first and second layers are formed;
- a cooling step of cooling the substrate on which the first and second layers are formed, after the firing step;
- and
- wherein the first layer and voids are uniformly present between the second layer containing the piezoelectric/electrostrictive material and the substrate, and
- wherein the coverage of the first layer with respect to the substrate is 98% or less.
Dependencies are inferred from the claim text.