Piezoelectric MEMS element, voltage control oscillator, communication apparatus, and method of manufacturing piezoelectric drive type MEMS element
AssigneeFUJIFILM Corporation
InventorYoshikazu Hishinuma
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Abstract
A piezoelectric drive type MEMS element includes: a first substrate including, in a portion thereof, a movable part which is driven by a piezoelectric drive section to be displaced in a convex shape, a movable electrode being provided on a surface of the movable part; and a second substrate which is bonded to the first substrate and supports a fixed electrode facing the movable electrode via a prescribed gap, wherein the piezoelectric drive section includes a piezoelectric film provided on a region of the first substrate which forms the movable part as a portion of the movable part, and a pair of electrodes disposed so as to sandwich the piezoelectric film.
Claims14
A piezoelectric drive type MEMS element comprising:
- a first substrate including, in a portion thereof, a movable part which is driven by a piezoelectric drive section to be displaced in a convex shape, a movable electrode being provided on a surface of the movable part;
- and
- a second substrate which is bonded to the first substrate and supports a fixed electrode facing the movable electrode via a prescribed gap,
- wherein the piezoelectric drive section includes a piezoelectric film provided on a region of the first substrate which forms the movable part as a portion of the movable part, and a pair of electrodes disposed so as to sandwich the piezoelectric film.
Dependencies are inferred from the claim text.