Corner layout for superjunction device

A superjunction device comprising:

• a doped layer;
• an active cell region having a plurality of active cell column structures formed in the doped layer;
• and
• a termination region having one or more termination column structures formed in the doped layer surrounding the active cell region,
• wherein the active cell column structures and termination column structures are characterized by a dose Qimp of first conductivity type dopants, wherein the doped layer is characterized by a thickness t and a dopant density M of second conductivity type dopants per unit volume of an opposite charge type to the first conductivity type dopants;
• wherein a layout of the column structures in an active cell region is configured so that a charge due to the first conductivity type dopants balances out charge due to the second conductivity type dopants in the doped layer in the active cell region,
• wherein a corner layout of end portions of the column structures of the active cell region proximate the termination column structures is configured so that a charge due to the first conductivity type dopants in the end portions and a charge due to the first conductivity type dopants in the termination column structures balances out charge due to the second-type dopants in the adjacent portions of the doped layer, wherein a configuration of a layout of end portions of active cell column structures proximate a corner of the termination column structures takes into account a curvature of the corner, wherein a portion of the doped layer proximate the corner is divided into one or more regions of area A and the end portions of the active cell column structures at the corner are laid out such that each of the one or more regions of area A includes an area A1 containing termination column and/or active cell column structures of first conductivity type dopants such that, for each of the one or more regions of area A, A1/A is equal to a predetermined value, wherein the layout of the end portions of one or more of the active cell column structures proximate the corner includes a hooked portion, wherein the hooked portion bends toward a side closest to a center of a die on which the superjunction device is formed, wherein the hooked portion bends toward a side closest to a center of a die on which the superjunction device is formed.