Charged particle beam drawing apparatus and article manufacturing method

A method of manufacturing an article, the method comprising:

• performing drawing on a substrate using a drawing apparatus;
• developing the substrate on which the drawing has been performed;
• and
• processing the developed substrate to manufacture the article,
• wherein the drawing apparatus performs the drawing on the substrate with the charged particle beams, the apparatus comprising:
• an optical system housing configured to emit a charged particle beam toward the substrate;
• a stage configured to hold the substrate and be moved at least in a direction perpendicular to an axis of the optical system housing;
• a detection device including a detector and a support for supporting the detector such that the detector faces a side surface of the stage, and configured for measuring a position of the stage;
• and
• a magnetic shield member provided to the stage and configured to shield an opening of the optical system housing that faces a top surface of the stage from a magnetic field,
• wherein the magnetic shield member is provided to the stage at a region, in a direction of the axis, other than a region where the detection device is provided.