Particle beam microscope
AssigneeCarl Zeiss Microscopy GmbH
InventorsGerd Benner, Stefan Meyer, Steffen Niederberger, Dirk Preikszas
Life of this patent
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Abstract
A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angle β1 between a first straight line 551 extending through the point of intersection 51 and a center of the first substrate 351 and the object plane 19 differs from a second elevation angle β2 between a second straight line 552 extending through the point of intersection 51 and a center of the second substrate 352 and the object plane 19 by more than 14°.
Claims19
A particle beam microscope having a beam path, the microscope comprising:
- a magnetic lens having an optical axis and at least one front pole piece arranged in the beam path along the optical axis at a distance upstream of an object plane;
- an object holder, which is configured for mounting an object to be inspected at a point of intersection between the optical axis and the object plane;
- a vacuum enclosure defining a vacuum space and having an opening, wherein the front pole piece of the magnetic lens and the object are located within the vacuum space;
- and
- an X-ray detection unit;
- wherein the X-ray detection unit comprises:
- a detector mount;
- a first X-ray detector mounted on the detector mount and having a first radiation-sensitive substrate;
- a second X-ray detector mounted on a detector mount and having a second radiation-sensitive substrate;
- a flange mounted on and sealed against the vacuum enclosure, wherein the flange carries the detector mount such that at least one of a portion of the flange and the detector mount extend through the opening of the vacuum enclosure;
- wherein the first and second X-ray detectors are arranged such that a first elevation angle between a first straight line extending through the point of intersection and a center of the first substrate and the object plane differs from a second elevation angle between a second straight line extending through the point of intersection and a center of the second substrate and the object plane by more than 14°;
- and
- wherein the flange and the opening have a diameter such that the X-ray detection unit can be removed from the particle beam microscope without dismantling the vacuum enclosure.
Dependencies are inferred from the claim text.