Resist polymer, process for production thereof, resist composition, and process for production of substrated with patterns thereon

A resist polymer (Y′) comprising a polymer (Y) comprising:

• a constituent unit (A) having a lactone skeleton;
• a constituent unit (B) having an acid-eliminable group;
• a constituent unit (C) having a hydrophilic group;
• and
• a constituent unit (E) having a structure represented by formula (1),
• wherein
• the polymer (Y) comprises (meth)acrylic monomers;
• a content of the constituent unit (A) is 30 mol % or more based on the total number of constituent units of the resist polymer (Y′);
• and
• a content of the constituent unit (E) is 0.3 mol % or more based on the total number of the constituent units of the resist polymer (Y′):
• where
• L is a divalent linear, branched, or cyclic C1-20 hydrocarbon group which may have a substituent, a heteroatom, or a combination thereof;
• g is 3 to 24
• R11 is a g-valent linear, branched, or cyclic C1-12 hydrocarbon group, optionally having a substituent, a heteroatom, or a combination thereof, wherein
• the constituent unit (A) is selected from the group consisting of formulae (4-2), (4-3), (4-4), and (10-1)
• wherein,
• in the formula (4-2), R42 represents a hydrogen atom or a methyl group;
• R201 and R202 independently represent a hydrogen atom, a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, or a carboxy group esterified with C1-6 alcohol;
• A1 and A2 independently represents a hydrogen atom, a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, or a carboxy group esterified with C1-6 alcohol;
• or A1 and A2 together represent —O—, —S—, —NH—, or a C1-6 methylene chain [—(CH2)k— (wherein k represents an integer of 1 to 6)];
• X6 represents a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, a C1-6 acyl group, a C1-6 alkoxy group, a carboxy group esterified with C1-6 alcohol, a cyano group, or an amino group;
• the linear or branched C1-6 alkyl group may have, as a substituent, at least one group selected from a group consisting of a hydroxy group, a carboxy group, a C1-6 acyl group, a carboxy group esterified with C1-6 alcohol, a cyano group, and an amino group;
• n6 represents an integer of 0 to 4;
• and X6 may have a plurality of different groups if n6 is 2 or more;
• in the formula (4-3), R43 represents a hydrogen atom or a methyl group;
• R203 and R204 independently represent a hydrogen atom, a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, or a carboxy group esterified with C1-6 alcohol;
• A3 and A4 independently represent a hydrogen atom, a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, or a carboxy group esterified with C1-6 alcohol;
• or A3 and A4 together represent —O—, —S—, —NH—, or a C1-6 methylene chain, [—(CH2)1— (wherein 1 represents an integer of 1 to 6)], X7 represents a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, a C1-6 acyl group, a C1-6 alkoxy group, a carboxy group esterified with C1-6 alcohol, a cyano group, or an amino group;
• the linear or branched C1-6 alkyl group may have, as a substituent, at least one group selected from a group consisting of a hydroxy group, a carboxy group, a C1-6 acyl group, a carboxy group esterified with C1-6 alcohol, a cyano group, and an amino group;
• n7 represents an integer of 0 to 4;
• and X7 may have a plurality of different groups if n7 is 2 or m
• in the formula (4-4), R91, R92, R93, and R94 independently represent a hydrogen atom, a linear or branched C1-6 alkyl group, a hydroxy group, a carboxy group, or a carboxy group esterified with C1-6 alcohol;
• or R91 and R92 together represent —O—, —S—, —NH—, or a C1-6 methylene chain [—(CH2)t— (wherein t represents an integer of 1 to 6)];
• and m1 represents 1 or 2;
• and
• in the formula (10-1), R represents a hydrogen atom or a methyl group.