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US 8,476,361 B2Granted
Fine pattern transfer material
AssigneeShowa Denko K.K.
InventorsToshio Fujita, Hiroshi Uchida, Katsutoshi Morinaka, Katsumasa Hirose
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Abstract
A transfer material that can favorably form a fine pattern by nanoimprinting. The nanoimprinting transfer material is a fine pattern resin composition that includes an organosilicon compound and a metal compound of a metal from groups 3 through 14 of the periodic table.
Claims10
A colorless, clear fine pattern transfer material used for nanoimprinting, comprising a base resin and a metal compound of a metal from groups 3 through 14 of the periodic table,
- wherein said base resin consists essentially of an organosilicon compound, and
- wherein said metal compound is expressed by the following Formula (1);
- M(OR)n (1)
- where M represents a metal element belonging to group 3 through group 14 in the periodic table, R represents an alkyl group with between 1 and 6 carbon atoms or a phenyl group, and n represents an integer between 1 and 5.
1 more element
Dependencies are inferred from the claim text.