Substrate structure with compliant bump and manufacturing method thereof

A manufacturing method of a substrate structure with compliant bump comprises the steps of:

• providing a substrate having a surface, a trace layer formed on the surface and a protective layer covering the trace layer, wherein the trace layer comprises a plurality of conductive pads, each of the conductive pads comprises an outer lateral wall and an upper surface, the protective layer comprises a plurality of openings, each of the openings reveals each of the conductive pads and comprises an inner lateral wall, wherein a first accommodating space is formed between the inner lateral wall and the outer lateral wall;
• forming a photoresist layer on the surface of the substrate and covering the trace layer and the protective layer with the photoresist layer;
• patterning the photoresist layer to form a plurality of insulating bumps, mentioned insulating bumps are formed on the surface and located at the first accommodating space, each of the insulating bumps comprises a top surface, an inner surface and an outer surface and defines a first body and a second body, wherein the first body is located on the surface and comprises a first width, the second body is located on top of the first body and protrudes from the protective layer, a second width is formed between the inner lateral wall and the outer lateral wall, and mentioned second width is not smaller than the first width;
• forming a metallic layer on the top surface, the inner surface, the outer surface of the insulating bump, the protective layer, and the upper surface of the conductive pad;
• and
• removing the metallic layer located at the protective layer.