US 8,476,113 B2Granted

Method of manufacturing semiconductor device

AssigneeRenesas Electronics Corporation

InventorsBunshi Kuratomi, Fukumi Shimizu

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Abstract

When chip-scale molding system is employed for QFP, the number of semiconductor devices available from a leadframe decreases because cavities each requires a runner portion. This problem can be overcome by employing MAP system, but use of a laminate tape increases the production cost. In through mold system, each cavity needs an ejector pin, which however makes it difficult to place a support pillar. The present application provides a manufacturing method of a semiconductor device by filling, while sandwiching a leadframe between mold dies having a matrix-state cavity group in which cavity columns obtained by linking mold cavities in series via a through gate have been placed in rows, a sealing resin in the cavities. In this method, the matrix-state cavity group has, at the cavity corner portions thereof, a support pillar having a cross-section striding over all the cavities adjacent to the cavity corner portions when viewed planarly.

Claims16

Dependent claims

A method of manufacturing a semiconductor device, comprising the steps of:

(a) providing a lead frame in which a plurality of unit device regions equipped with a die pad, a plurality of leads placed around the die pad, and a frame portion for supporting the die pad and the leads, the unit device regions being arranged in a two-dimensional matrix form;
(b) fixing the back surface of a semiconductor chip having a plurality of electrode pads arranged on a surface of the semiconductor chip onto the die pad;
(c) coupling the leads and the electrode pads via a wire;
(d) after the step (c), forming, in a molding apparatus, a resin sealing body in each of the unit device regions by transfer molding while sandwiching the leadframe between a lower mold die and an upper mold die configuring a mold die set;
and
(e) releasing, in the molding apparatus, the leadframe encapsulated in the resin sealing body from the lower mold die or the upper mold die,
wherein in the step (d), the mold die set comprises:
(x1) a matrix-state cavity group in which a plurality of cavity columns obtained by linking, in series via a through gate, a plurality of mold cavities provided between the lower mold die and the upper mold die have been placed in a plurality of rows so that they correspond to the unit device regions placed in a two-dimensional matrix form;
(x2) a movable ejector pin provided in the lower mold die to correspond to each of the mold cavities belonging to the matrix-state cavity group;
and
(x3) a plurality of support pillars provided at a plurality of cavity corner portions of the matrix-state cavity group so as not to planarly overlap with the movable ejector pin and to stride over four mold cavities surrounding therewith each of the cavity corner portions.

8 more elements

A method of manufacturing a semiconductor device comprising the steps of:

(a) providing a lead frame in which a plurality of unit device regions equipped with a die pad, a plurality of leads placed around the die pad, and a frame portion for supporting the die pad and the leads, the unit device regions being arranged in a two-dimensional matrix form;
(b) fixing the back surface of a semiconductor chip having a plurality of electrode pads arranged on a surface of the semiconductor chip onto the die pad;
(c) coupling the leads and the electrode pads via a wire;
(d) after the step (c), forming, in a molding apparatus, a resin sealing body in each of the unit device regions by transfer molding while sandwiching the leadframe between a lower mold die and an upper mold die configuring a mold die set;
and
(e) releasing, in the molding apparatus, the leadframe encapsulated in the resin sealing body from the lower mold die or the upper mold die,
wherein in the step (d), the mold die set comprises:
(x1) a matrix-state cavity group in which a plurality of cavity columns obtained by linking, in series via a through gate, a plurality of mold cavities provided between the lower mold die and the upper mold die have been placed in a plurality of rows so as to correspond to the unit device regions placed in a two-dimensional matrix form;
and
(x2) a plurality of support pillars provided at a plurality of cavity corner portions of the matrix-state cavity group so as to stride over four mold cavities planarly surrounding therewith each of the cavity corner portions.

7 more elements

Dependencies are inferred from the claim text.