Method for fabricating solar cell comprising condenser lens and photoelectric conversion element
AssigneePanasonic Corporation
InventorsHidekazu Arase, Tohru Nakagawa
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Abstract
The purpose of the present invention is to provide a method for disposing a photoelectric conversion element accurately on the focal point of a condenser lens. The method of the present invention comprises a step of forming a focal point on the reverse surface of the condenser lens to be a hydrophilic region, a step of removing the remained photoresist to obtain the condenser lens having the reverse surface where the hydrophilic region is surrounded by a water-repellent region formed of the fluoroalkylsilane film and a step of disposing the photoelectric conversion element on the hydrophilic region to obtain the solar cell comprising the condenser lens and the photoelectric conversion element.
Claims8
A method for fabricating a solar cell comprising a condenser lens and a photoelectric conversion element, the method comprising steps of:
- a step (a) of preparing the condenser lens comprising a convex part on the obverse surface thereof and a flat reverse surface;
- a step (b) of forming an alkylsilane film on the obverse surface of the condenser lens and forming a fluoroalkylsilane film on the reverse surface of the condenser lens;
- a step (c) of immersing the condenser lens in a solution containing aminoalkylsilane to form an aminoalkylsilane film on the fluoroalkylsilane film;
- wherein
- the aminoalkylsilane film is not formed on the alkylsilane film;
- a step (d) of forming a photoresist on the aminoalkylsilane film;
- a step (e) of irradiating the obverse surface of the condenser lens with light to expose a part of the photoresist located at a focal point on the photoresist to light through a focal point on the reverse surface of the condenser lens, a focal point on the fluoroalkylsilane film, and a focal point on the aminoalkylsilane film;
- a step (f) of removing the exposed part of the photoresist to form a opening where the focal point of the aminoalkylsilane film is exposed;
- a step (g) of removing a part of the aminoalkylsilane film located at the focal point of the aminoalkylsilane film and a part of the fluoroalkylsilane film located at the focal point of the fluoroalkylsilane film by an oxygen plasma treatment or an ozone plasma treatment through the opening so as to cause the focal point on the reverse surface of the condenser lens to be a hydrophilic region;
- a step (h) of removing the remained photoresist to obtain the condenser lens having the reverse surface where the hydrophilic region is surrounded by a water-repellent region formed of the fluoroalkylsilane film;
- and
- a step (i) of disposing the photoelectric conversion element on the hydrophilic region to obtain the solar cell comprising the condenser lens and the photoelectric conversion element.
A method for fabricating a condenser lens, the method comprising steps of:
- a step (a) of preparing the condenser lens comprising a convex part on the obverse surface thereof and a flat reverse surface;
- a step (b) of forming an alkylsilane film on the obverse surface of the condenser lens and forming a fluoroalkylsilane film on the reverse surface of the condenser lens;
- a step (c) of immersing the condenser lens in a solution containing aminoalkylsilane to form an aminoalkylsilane film on the fluoroalkylsilane film;
- wherein
- the aminoalkylsilane film is not formed on the alkylsilane film;
- a step (d) of forming a photoresist on the aminoalkylsilane film;
- a step (e) of irradiating the obverse surface of the condenser lens with light to expose a part of the photoresist located at a focal point on the photoresist to light through a focal point on the reverse surface of the condenser lens, a focal point on the fluoroalkylsilane film, and a focal point on the aminoalkylsilane film;
- a step (f) of removing the exposed part of the photoresist to form an opening where the focal point of the aminoalkylsilane film is exposed;
- a step (g) of removing a part of the aminoalkylsilane film located at the focal point of the aminoalkylsilane film and a part of the fluoroalkylsilane film located at the focal point of the fluoroalkylsilane film by an oxygen plasma treatment or an ozone plasma treatment through the opening so as to cause the focal point on the reverse surface of the condenser lens to be a hydrophilic region;
- and
- a step (h) of removing the remained photoresist to obtain the condenser lens having the reverse surface where the hydrophilic region is surrounded by a water-repellent region formed of the fluoroalkylsilane film.
Dependencies are inferred from the claim text.