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US 8,476,088 B2Granted
Light emitting diode having improved light emission efficiency and method for fabricating the same
AssigneeIndustrial Cooperation Foundation Chonbuk National University
InventorsIn Hwan Lee, Lee Woon Jang, Jin Woo Ju, Jung Hun Choi, Jae Woo Park
Life of this patent
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Abstract
Provided is a light emitting diode (LED) having improved light emission efficiency, which can effectively overcome a technical limit of the related art by implementing a surface plasma resonance effect as well as reducing a layer defect such as threading dislocations in an LED structure.
Claims10
A method for fabricating a light emitting diode, comprising:
- a) providing a first conductive semiconductor layer onto a substrate;
- b) forming a porous region by dry or wet etching the top of the first conductive semiconductor layer;
- c) forming a metal layer on the first conductive semiconductor layer where the porous region is formed;
- d) regrowing the first conductive semiconductor layer on the metal layer;
- e) forming an active layer on the regrown first conductive semiconductor layer;
- and
- f) forming a second conductive semiconductor layer on the active layer,
- wherein at step d), the first conductive semiconductor layer is regrown while the metal layer is discontinuously patterned in the porous region by annealing and the regrown first conductive semiconductor layer has a thickness to generate surface plasma resonance between the patterned metal layer and the active layer.
5 more elements
Dependencies are inferred from the claim text.