Method of forming organic film, and organic film, nozzle plate, inkjet head and electronic device
AssigneeFUJIFILM Corporation
InventorHiroki Uchiyama
Life of this patent
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Abstract
The method of forming an organic film, includes: an organic film formation step of forming an organic film on a surface of a base member using a silane coupling agent; and a post-processing step including a water vapor introduction step of holding the base member on which the organic film has been formed in an atmosphere containing at least water vapor, and a dehydration processing step of holding the base member in an atmosphere having a smaller presence of water vapor than the atmosphere in the water vapor introduction step.
Claims6
A method of forming an organic film, comprising:
- an organic film formation step of forming an organic film on a surface of a base member using a silane coupling agent;
- and
- a post-processing step including a water vapor introduction step of holding the base member on which the organic film has been formed in an atmosphere containing at least water vapor, and a dehydration processing step of holding the base member in an atmosphere having a smaller presence of water vapor than the atmosphere in the water vapor introduction step,
- wherein in the dehydration processing step, the base member undergoes a vacuum process.
A method of forming an organic film, comprising:
- an organic film formation step of forming an organic film on a surface of a base member using a silane coupling agent;
- and
- a post-processing step including a water vapor introduction step of holding the base member on which the organic film has been formed in an atmosphere containing at least water vapor, and a dehydration processing step of holding the base member in an atmosphere having a smaller presence of water vapor than the atmosphere in the water vapor introduction step,
- wherein in the dehydration processing step, the base member undergoes a purging process.
An organic film formed by a method of forming organic film, the method comprising:
- an organic film formation step of forming an organic film on a surface of a base member using a silane coupling agent;
- and
- a post-processing step including a water vapor introduction step of holding the base member on which the organic film has been formed in an atmosphere containing at least water vapor, and a dehydration processing step of holding the base member in an atmosphere having a smaller presence of water vapor than the atmosphere in the water vapor introduction step,
- wherein the organic film includes a non-crystalline layer.
Dependencies are inferred from the claim text.