Microfluidic device and method of manufacturing the same and sensor incorporating the same

A sensor device, comprising:

• a microfluidic device, comprising:
• a first substrate having a first surface;
• a second substrate having a second surface, wherein the second surface contacts the first surface therewith defining an interface between the first and second substrates;
• a set of recesses, consisting of first recesses and second recesses, provided at the interface;
• and
• a first porous material disposed in at least one recess among the set of recesses,
• wherein the first recesses and second recesses form a channel meandering in a plane at right angles to the interface, and
• wherein the first recesses are disposed in the first surface of the first substrate and the second recesses are disposed in the second surface of the second substrate;
• and
• a detector configured to measure a response signal generated within the microfluidic device.

A method of manufacturing a microfluidic device, the method comprising:

• providing a set of recesses, consisting of a plurality of first recesses within a first surface of a first substrate and a plurality of second recesses within a second surface of a second substrate;
• providing a first porous material in at least one recess among the set of recesses;
• and
• contacting the first surface with the second surface therewith defining an interface between the first and second substrates, so that the first recesses and the second recesses form a channel meandering in a plane at right angles to the interface,
• wherein providing the first porous material in at least one recess among the set of recesses comprises providing the first porous material in all of the plurality of first recesses and providing the first porous material in all of the plurality of second recesses.