Diffusing agent composition, method of forming impurity diffusion layer, and solar battery
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakashi Kamizono, Toshiro Morita, Atsushi Murota, Motoki Takahashi, Katsuya Tanitsu, Takaaki Hirai
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Abstract
An embodiment of the present invention relates to a diffusing agent composition used in printing an impurity-diffusing component onto a semiconductor substrate, wherein the diffusing agent composition contains: a hydrolysis product of alkoxysilane (A); a component (B) containing at least one selected from the group consisting of a hydrolysis product of alkoxy titanium, a hydrolysis product of alkoxy zirconium, titania fine particle, and zirconia fine particle; an impurity-diffusing component (C); and an organic solvent (D).
Claims8
A diffusing agent composition used in printing an impurity-diffusing component onto a semiconductor substrate, the diffusing agent composition containing:
- a hydrolysis product of alkoxysilane (A);
- a component (B) containing at least one selected from the group consisting of a hydrolysis product of alkoxy titanium, a hydrolysis product of alkoxy zirconium, titania fine particle, and zirconia fine particle;
- an impurity-diffusing component (C);
- and
- an organic solvent (D).
Dependencies are inferred from the claim text.