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US 8,475,670 B2Granted
Method for manufacturing a patterned magnetic media with offset data and servo regions
AssigneeHGST Netherlands B.V.
InventorsMichael K. Grobis, Jeffrey S. Lille, Ricardo Ruiz
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Abstract
A method for manufacturing a patterned magnetic media. The method allows both a data region and a servo region to be patterned without the patterning of one region adversely affecting the patterning of the other region. The method results in a patterned data region a patterned servo region and intermediate regions between the servo and data regions. The intermediate regions, which are most likely, but not necessarily, asymmetrical with one another indicate that the method has been used to pattern the media.
Claims11
A method for manufacturing a magnetic media for magnetic data recording, comprising:
- providing a wafer, the wafer having a first region and a second region;
- depositing a first layer of hard mask material;
- patterning the first layer of hard mask with a first pattern;
- forming a first protective mask, the first protective mask covering at least a portion of the second region and leaving at least a portion of the first region uncovered;
- performing a first material removal process to remove portions of the wafer that are not protected by the patterned first layer of hard mask material or the first protective mask to from a recessed pattern in the first region;
- removing the first protective mask and the first layer of hard mask material;
- depositing a second layer of hard mask material;
- forming a second protective mask, the second protective mask covering at least a portion of the first region and leaving at least a portion of the second region uncovered;
- patterning the second layer of hard mask with a second pattern;
- and
- performing a second material removal process to remove a portion of the wafer that is not protected by the patterned second layer of hard mask material or the second protective mask to form a recessed pattern in the second region;
- wherein the first region and second region are either a servo region and a data region or a data region and a servo region.
9 more elements
Dependencies are inferred from the claim text.