Method of reusing a consumable part for use in a plasma processing apparatus
AssigneeTokyo Electron Limited
InventorsNobuyuki Nagayama, Naoyuki Satoh, Keiichi Nagakubo, Kazuya Nagaseki
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Abstract
A method of reusing a consumable part for use in a plasma processing apparatus includes cleaning a surface of the consumable part made of SiC that has been eroded by a first plasma process performed for a specific period of time. The method further includes depositing SiC on the cleaned surface of the eroded consumable part by CVD. The method also includes remanufacturing a consumable part having a predetermined shape by machining the eroded consumable part on which the SiC is deposited for performing a second plasma process on a substrate by using the remanufactured consumable part.
Claims6
A method of reusing a consumable part for use in a plasma processing apparatus, the method comprising:
- cleaning a surface of the consumable part made of SiC that has been eroded by a first plasma process performed for a specific period of time;
- depositing SiC on the cleaned surface of the eroded consumable part by CVD;
- remanufacturing a consumable part having a predetermined shape by machining the eroded consumable part on which the SiC is deposited for performing a second plasma process on a substrate by using the remanufactured consumable part.
Dependencies are inferred from the claim text.