Crystal preparing device, crystal preparing method, and crystal
AssigneeRicoh Company, Ltd.
InventorsHirokazu Iwata, Seiji Sarayama, Akihiro Fuse
Life of this patent
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Abstract
In a crystal preparing device, a crucible holds a mixed molten metal containing alkali metal and group III metal. A container has a container space contacting the mixed molten metal and holds a molten alkali metal between the container space and an outside of the container, the molten alkali metal contacting the container space. A gas supply device supplies nitrogen gas to the container space. A heating device heats the crucible to a crystal growth temperature. The crystal preparing device is provided so that a vapor pressure of the alkali metal which evaporates from the molten alkali metal is substantially equal to a vapor pressure of the alkali metal which evaporates from the mixed molten metal.
Claims5
A crystal preparing method which produces a group III nitride crystal using a crystal preparing device, the crystal preparing device including a crucible holding a mixed molten metal containing alkali metal and group III metal, a reaction container having a container space which contacts the mixed molten metal and holding a molten alkali metal between the container space and an outside of the container, the molten alkali metal contacting the container space, and a piping disposed below the crucible and connected with the reaction container, the crystal preparing method comprising:
- a first step of placing the alkali metal and the group III metal into the crucible in an inert gas or nitrogen gas atmosphere;
- a second step of placing the alkali metal into the piping in the inert gas or nitrogen gas atmosphere;
- a third step of filling the container space of the reaction container with nitrogen gas;
- a fourth step of heating the crucible to a crystal growth temperature;
- a fifth step of heating the molten alkali metal at a specific temperature at which a vapor pressure of the alkali metal which evaporates from the molten alkali metal is substantially equal to a second vapor pressure of the alkali metal which evaporates from the mixed molten metal;
- and
- a sixth step of holding a temperature of the crucible to the crystal growth temperature, and holding a temperature of the molten alkali metal to the specific temperature for a predetermined time.
Dependencies are inferred from the claim text.