Method for producing a single crystal of semiconductor material
AssigneeSiltronic AG
InventorsWilfried von Ammon, Ludwig Altmannshofer, Helge Riemann, Joerg Fischer
Life of this patent
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AssigneeSiltronic AG
InventorsWilfried von Ammon, Ludwig Altmannshofer, Helge Riemann, Joerg Fischer
Estimating the term…
A single crystal of semiconductor material is produced by a method of melting semiconductor material granules by means of a first induction heating coil on a dish with a run-off tube consisting of the semiconductor material, forming a melt of molten granules which extends from the run-off tube in the form of a melt neck and a melt waist to a phase boundary, delivering heat to the melt by means of a second induction heating coil which has an opening through which the melt neck passes, crystallizing the melt at the phase boundary, and delivering a cooling gas to the run-off tube and to the melt neck in order to control the axial position of an interface between the run-off tube and the melt neck.
A method for producing a single crystal of semiconductor material, comprising
Dependencies are inferred from the claim text.