Catheter with multiple microfabricated temperature sensors

A catheter comprising:

• an elongated flexible tubular catheter body having proximal and distal ends;
• a tip section at the distal end of the catheter body, the tip section comprising a tubing section and a tip electrode at a distal end of the tubing section, wherein the tip section has on its outer surface at least one integrated microfabricated circumferential temperature sensor extending circumferentially about 60 degrees around the outer surface of the tip section, a first circumferential temperature sensor being on an outer circumferential surface of the tip electrode, and the tip electrode has on at least a portion of an outer surface of its distal-most tip end an integrated microfabricated tip temperature sensor, wherein each of the microfabricated tip temperature sensor and the integrated microfabricated circumferential temperature sensor comprises a contact layer and a sensor layer, the sensor layer having a thickness of about 500 nm or less,
• wherein the contact layer of the tip temperature sensor is embedded in the outer surface of the distal-most tip end of the tip electrode, and the sensor layer of the tip temperature sensor is on the contact layer and the outer surface of the distal-most tip end of the tip electrode.