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US 8,475,228 B2Granted
Polishing pad with partially recessed window
AssigneeApplied Materials, Inc.
InventorsDominic J. Benvegnu, Boguslaw A. Swedek, Jimin Zhang
Life of this patent
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Abstract
A polishing pad has an opaque polishing layer with an aperture therethrough and a polishing surface, and a solid light-transmissive window in the aperture. The solid light-transmissive window includes an outer portion secured to the polishing layer and an inner portion secured to the outer portion. The outer portion has a upper surface recessed relative to the polishing surface, whereas the inner portion has an upper surface that is substantially co-planar with the polishing surface.
Claims17
A polishing pad, comprising:
- an opaque polishing layer having an aperture therethrough and having a polishing surface;
- and
- a solid light-transmissive window in the aperture, the solid light-transmissive window including
- a single outer portion directly contacting and secured to a sidewall of the aperture through the polishing layer, the outer portion having a flat upper surface, the flat upper surface parallel to and recessed relative to the polishing surface, wherein the upper surface where the outer portion contacts the sidewall is not covered by the polishing layer, and
- a single inner portion secured to the outer portion, the inner portion having an upper surface that is substantially co-planar with the polishing surface, wherein the outer portion completely surrounds the inner portion.
2 more elements
Dependencies are inferred from the claim text.