Acceleration sensor

An acceleration sensor comprising an acceleration sensor element including

• a support frame,
• a weight movable relative to the support frame when acceleration is applied from an outside,
• a plurality of flexible beams for connecting the weight and the support frame to support the weight,
• semiconductor piezoresistance elements provided on the beams near sites where the beams are connected to the weight or the support frame, and
• wirings connected to the semiconductor piezoresistance elements and provided on the beams,
• the acceleration sensor element being adapted to detect the acceleration applied from the outside in response to changes in resistance of the semiconductor piezoresistance elements,
• wherein of the plurality of beams, the beams provided with the semiconductor piezoresistance elements for detecting acceleration in a thickness direction of the beams each have at least one stress damping section,
• wherein the stress damping section is provided on a portion of the beam which is outside regions of the beam where the semiconductor piezoresistance elements are provided, and
• the beams is symmetrical with respect to a point of intersection between a length center line of the beam and a width center line of the beam.