# US 8,474,060 B2 · Scanning probe microscope with compact scanner > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,474,060 B2 - Document ID: US8474060B2 - Status: Granted - Kind: B2 - Application number: 13/068,052 - Filed: 2011-04-29 - Published: 2012-11-01 - Granted: 2013-06-25 - Earliest claimed: 2011-04-29 - Assignees: Bruker Nano, Inc. - Applicants: Nghi Phan; Jeff Markakis; Johannes Kindt; Carl Masser - Inventors: Nghi Phan; Jeff Markakis; Johannes Kindt; Carl Masser - Web page: https://patentgrep.com/patent/US8474060B2 ## CPC - G01Q 70/02: Probe holders - B82Y 35/00: Methods or apparatus for measurement or analysis of nanostructures - G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz. ## Claims ### Claim 1 A scanner for a scanning probe microscope (SPM) including a head, the scanner comprising: a scanner body housing an actuator and a sensor, the sensor detecting scanner movement; and wherein the scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. ### Claim 2 (depends on 1) The scanner of claim 1, wherein the scanner is a Z-scanner providing motion of a probe device coupled thereto substantially only in a direction orthogonal to a sample being scanned. ### Claim 3 (depends on 2) The scanner of claim 2, further comprising a flexure diaphragm coupled between the actuator and the probe device that restricts motion of the probe device laterally relative to the direction. ### Claim 4 (depends on 1) The scanner of claim 1, wherein the sensor substantially measures motion of the probe device in the direction, and at least a portion of the sensor is supported by the body. ### Claim 5 (depends on 4) The scanner of claim 4, wherein the sensor includes a cantilevered element having fixed and free ends, and a link, and wherein one of the link is coupled to the free end of the cantilevered element, and an opposite end of the link is coupled to a probe holder supporting the probe device. ### Claim 6 (depends on 1) The scanner of claim 1, wherein the body is hermetically sealed to facilitate operation in fluid. ### Claim 7 (depends on 6) The scanner of claim 6, wherein the sensor further includes strain gauges disposed substantially at a fixed end of the cantilevered element. ### Claim 8 (depends on 1) The scanner of claim 1, wherein the body has a) a first open end for coupling the scanner to a free end portion of a head of the SPM, the free end portion having an outer surface and extending towards a sample, and b) a second closed end that supports a probe holder, and wherein the body has an inner surface extending between the first and second ends. ### Claim 9 (depends on 8) The scanner of claim 8, wherein the outer surface and the inner surface are similarly tapered so as to be mated to one another. ### Claim 10 (depends on 9) The scanner of claim 9, wherein an angle defined by the tapered inner surface is between about 15 degrees and 35 degrees. ### Claim 11 (depends on 1) The scanner of claim 1, wherein a fundamental resonant frequency associated with the scanner is greater than 10 kHz. ### Claim 12 (depends on 10) The scanner of claim 10, wherein the fundamental resonant frequency is greater than 40 kHz. ### Claim 13 (depends on 1) The scanner of claim 1, wherein the free end portion is a housing forming part of the head. ### Claim 14 (depends on 1) The scanner of claim 1, wherein the probe holder is rigidly coupled to the body. ### Claim 15 (depends on 8) The scanner of claim 8, wherein the inner surface includes an annular detent to accommodate a sealing element disposed in a groove in the outer surface. ### Claim 16 (depends on 8) The scanner of claim 8, further comprising a vacuum port in the free end portion that applies a vacuum force to the body. ### Claim 17 (depends on 16) The scanner of claim 16, wherein the vacuum port is coupled to a vacuum orifice in the free end portion, the vacuum orifice in the free end portion being connected to a vacuum orifice in the body. ### Claim 18 (depends on 1) The scanner of claim 1, further comprising at least one slot to receive an alignment pin supported by the head to orient a tip of the probe relative to the head. ### Claim 19 A method of operating an atomic force microscope (AFM) having a head, the method comprising: providing a scanner including a body having a total volume less than about five square inches and supporting a probe device; attaching the scanner to the head by hand and without using tools; and operating the AFM. ### Claim 20 (depends on 18) The method of claim 18, further comprising directly sensing movement of the probe device with a sensor at least partly supported by the housing.