US 8,467,126 B2 · Stage driver for movable stages

Abstract

A manually operated driver for precision support stages having coarse and optional fine position control. A yoke connected to a movable stage slides along a shaft parallel to the direction of motion of the stage. The yoke has opposing pivot members that can, in one position, contact the shaft to self-lock the position of the yoke on the shaft and, in another position, remain clear of the shaft thereby allowing the yoke to slide freely on the shaft for coarse position control. The shaft has threads at one end that turn into a support block. Turning of the shaft with a knob and with the yoke locked to the shaft, slowly changes the position of the yoke and the connected stage for fine position adjustment of the stage. A pair of such drivers in orthogonal orientation on parallel x-y movable stages will provide two dimensional motion of stages.

Claims12

Dependent claims

A stage driver for a movable stage comprising:

a shaft adjacent to an outer edge of a movable stage;
a yoke slideable on said shaft, the yoke having a portion affixed to the outer edge of the movable stage, the yoke having at least one holdable pivot member, joined to the yoke at a pivot, with a first end that can contact the shaft in a first pivoted position that locks the yoke relative to the shaft and that pivots away from the shaft in a second pivot position that frees the yoke for sliding on the shaft, the pivot member having a second end that controls pivoting in relation to the yoke, the second end moving toward the yoke when the first end moves away from the yoke, whereby freeing the yoke from the shaft by pivoting the pivot member away from the shaft allows the yoke to slide along the shaft, thereby moving the movable stage concurrently wherein the shaft is supported in apertures in fixed blocks with screw threads on one block and on the shaft turned by a knob at an end of the shaft, whereby turning of the knob changes the linear position of the shaft relative to the blocks.

A driver for a stage having a fixed member and a member movable relative to the fixed member in a linear direction comprising:

a guide shaft oriented in a direction parallel to a linear direction of motion of a movable stage member and having opposed ends supported by spaced apart blocks, one of the shaft ends having a fine motion adjustment device relative to the blocks;
a yoke slideably mounted on the shaft and affixed to the movable stage member thereby controlling coarse motion of the movable stage member;
the yoke having at least one holdable pivot member, joined to the yoke at a pivot, with a first end that can contact the shaft in a first pivoted position that locks the yoke relative to the shaft and that pivots away from the shaft in a second pivot position that frees the yoke for sliding on the shaft, the pivot member having a second end that holdably controls pivoting in relation to the yoke, the second end moving toward the yoke when the first end moves away from the yoke, whereby freeing the yoke from the shaft by pivoting the pivot member away from the shaft allows the yoke to slide along the shaft to establish a rough position of the movable stage and the fine motion adjustment device allows establishing a fine position of the movable stage.

Dependencies are inferred from the claim text.

Stage driver for movable stages

Life of this patent

Stage driver for movable stages

Life of this patent

Abstract

Claims12