# US 8,465,907 B2 · Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server

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- Number: US 8,465,907 B2
- Document ID: US8465907B2
- Status: Granted
- Kind: B2
- Application number: 13/525,712
- Filed: 2012-06-18
- Published: 2012-10-18
- Granted: 2013-06-18
- Earliest claimed: 2001-05-31
- Assignees: Kabushiki Kaisha Toshiba
- Applicants: Masamitsu Itoh
- Inventors: Masamitsu Itoh
- Web page: https://patentgrep.com/patent/US8465907B2

## CPC

- G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details}
- G03F 1/60: Substrates
- G03F 7/703: {Non-planar pattern areas or non-planar masks, e.g. curved masks or substrates}
- G03F 7/70433: {Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors}
- G03F 7/70783: {Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight}
- Y10S 438/975: Substrate or mask aligning feature
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

There is disclosed a manufacturing method for exposure mask, which comprises acquiring a first information showing surface shape of surface of each of a plurality of mask substrates, and a second information showing the flatness of the surface of each of mask substrates before and after chucked on a mask stage of an exposure apparatus, forming a corresponding relation of each mask substrate, the first information and the second information, selecting the second information showing a desired flatness among the second information of the corresponding relation, and preparing another mask substrate having the same surface shape as the surface shape indicated by the first information in the corresponding relation with the selected second information, and forming a desired pattern on the above-mentioned another mask substrate.

## Claims

### Claim 1

A method of manufacturing a device, comprising:
preparing a mask substrate, wherein a simulated flatness of a surface of the mask substrate when the mask substrate is chucked on an exposure apparatus satisfies a specification of a flatness with respect to the surface of the mask substrate;
forming a device pattern on the mask substrate to manufacture an exposure mask;
chucking the exposure mask on a mask stage of the exposure apparatus; and
forming the device pattern on a desired substrate, by using the exposure mask and the exposure apparatus.

### Claim 2 (depends on 1)

The method according to claim 1, wherein a peripheral region of the mask substrate is lower in height than a central portion of the mask substrate, and the height decreases with a distance from the central portion toward a peripheral edge of the mask substrate.

### Claim 3 (depends on 1)

The method according to claim 1, wherein, in preparing the mask substrate, the mask substrate is chucked at the surface of the mask substrate on the exposure apparatus.

### Claim 4 (depends on 1)

The method according to claim 1, wherein the surface of the mask substrate includes a first region in which patterns are to be formed and a second region at which the mask substrate is to be chucked on the mask stage of the exposure apparatus.

### Claim 5 (depends on 1)

The method according to claim 1, further comprising measuring a flatness of the surface of the mask substrate, after the mask substrate is chucked on the exposure apparatus.

### Claim 6 (depends on 1)

The method according to claim 1, wherein the exposure mask is a reflector mask for ultraviolet ray exposure.