# US 8,465,810 B2 · Method and device for forming piezoelectric/pyroelectric film

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- Number: US 8,465,810 B2
- Document ID: US8465810B2
- Status: Granted
- Kind: B2
- Application number: 13/359,909
- Filed: 2012-01-27
- Published: 2012-12-20
- Granted: 2013-06-18
- Earliest claimed: 2011-06-20
- Assignees: Munekata Co., Ltd.
- Applicants: Yuji Umino
- Inventors: Yuji Umino
- Web page: https://patentgrep.com/patent/US8465810B2

## CPC

- H10N 30/704: {based on piezoelectric or electrostrictive films or coatings}
- H10N 30/045: by polarising
- H10N 30/077: by liquid phase deposition
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An electric field is formed between a material to be coated 18 and a coating sprayer 4 by applying a high voltage of −1 kV to −90 kV to an electrode needle 7 at a tip of the coating sprayer 4, while maintaining the material to be coated 18 positively. An inert gas is sprayed from an inert gas spraying nozzle 8 to the material to be coated 18, and a solution having a dielectric substance dissolved in a solvent is simultaneously sprayed from a dielectric solution spraying nozzle 6, while giving negative charge to the dielectric solution, to form a precursor polarization film. The solution is discharged from the spraying nozzle 6 by injecting the inert gas in the spraying nozzle 6. Then, the electric field is formed again and the precursor polarization film is further polarized, to thereby form a piezoelectric/pyroelectric film on the material to be coated 18.

## Claims

### Claim 1

A method for forming a piezoelectric/pyroelectric film on a material to be coated by an electric field coating and electric field polarization, the method comprising the steps of:
forming an electric field between the material to be coated and a coating sprayer by applying a high voltage of −1 kV to −90 kV to an electrode needle at a tip of the coating sprayer facing a coating surface of the material to be coated, while maintaining the material to be coated positively charged;
forming a precursor polarization film on the material to be coated by spraying an inert gas from an inert gas spraying nozzle at the tip of the coating sprayer onto the material to be coated, simultaneously spraying a solution with a dielectric substance dissolved in a solvent onto the material to be coated from a dielectric solution spraying nozzle at the tip of the coating sprayer, the dielectric solution spraying nozzle having the electrode needle at a center thereof, and giving negative charge to droplets of the dielectric solution, while moving the coating sprayer;
discharging all of the dielectric solution remaining in the dielectric solution spraying nozzle by temporarily stopping the electric field coating, moving the coating sprayer facing the material to be coated to face outside the material to be coated, and discharging the inert gas from the dielectric solution spraying nozzle of the coating sprayer; and
forming a piezoelectric/pyroelectric film on the material to be coated by returning the coating sprayer to an original position, forming the electric field between the material to be coated and the coating sprayer again, and further polarizing the precursor polarization film.

### Claim 2 (depends on 1)

A method for forming the piezoelectric/pyroelectric film on the material to be coated by the electric field coating and electric field polarization according to claim 1, further comprising the step of:
heating and drying the previously formed precursor polarization film and further performing the electric field polarization only, to form a piezoelectric/pyroelectric film on the material to be coated.

### Claim 3 (depends on 1)

A method for forming the piezoelectric/pyroelectric film on the material to be coated by the electric field coating and electric field polarization according to claim 1, wherein the temperature of the material to be coated is controlled to be at least 20° C. and no more than 125° C.

### Claim 4

A device for forming a piezoelectric/pyroelectric film on a material to be coated set in a receiving jig by an electric field coating and electric field polarization, comprising:
the receiving jig;
a coating sprayer including an inert gas spraying nozzle, a dielectric solution spraying nozzle, and an electrode needle at a central portion of the nozzles disposed to face the material to be coated set in the receiving jig, the inert gas spraying nozzle being connected to an inert gas force-feeding tank through an inert gas flow channel, the dielectric solution spraying nozzle being connected to a dielectric solution force-feeding tank through a dielectric solution flow channel, the inert gas flow channel and the dielectric solution flow channel being connected through a bypass channel, and the electrode needle being connected to a high voltage power supply through a high voltage applying cable; and
a control system configured to control:
forming an electric field between the electrode needle and the material to be coated by applying a high voltage to the electrode needle;
forming a precursor polarization film on a surface of the material to be coated by simultaneously spraying an inert gas and a dielectric solution from the inert gas spraying nozzle and the dielectric solution spraying nozzle, respectively;
discharging the solution remaining in the dielectric solution spraying nozzle by moving the coating sprayer outside the material to be coated and supplying the inert gas to the dielectric solution spraying nozzle through the bypass channel; and
performing the electric field polarization after moving the coating sprayer to face the material to be coated again.

### Claim 5 (depends on 4)

A device for forming the piezoelectric/pyroelectric film on the material to be coated by the electric field coating and electric field polarization according to claim 4, wherein the coating sprayer is attached to a handling device having a joint with two or more axes.

### Claim 6 (depends on 4)

A device for forming the piezoelectric/pyroelectric film on the material to be coated by the electric field coating and electric field polarization according to claim 4, wherein a heater for heating the material to be coated is provided in the receiving jig for setting and mounting the material to be coated.

### Claim 7

A method for forming a piezoelectric/pyroelectric film on a material to be coated by an electric field coating and electric field polarization, the method comprising the steps of:
providing a coating sprayer comprising a tip, a dielectric solution spraying nozzle at said tip, an inert gas spraying nozzle at said tip and an electrode needle at said tip;
providing an inert gas;
providing a solution with a dielectric substance dissolved in a solvent;
applying a high voltage of −1 kV to −90 kV to said electrode needle while maintaining the material to be coated in a grounded state to form an electric field between the material to be coated and said coating sprayer, said electrode needle facing a coating surface of the material to be coated;
spraying an inert gas from said inert gas spraying nozzle at the tip of the coating sprayer onto the material to be coated and simultaneously spraying said solution onto the material to be coated from said dielectric solution spraying nozzle and giving negative charge to droplets of the dielectric solution, while moving the coating sprayer to form a precursor polarization film on the material to be coated, said dielectric solution spraying nozzle having said electrode needle at a center thereof;
discharging all of said dielectric solution remaining in the dielectric solution spraying nozzle by temporarily stopping the electric field coating, moving the coating sprayer facing the material to be coated to face outside the material to be coated, and discharging the inert gas from the dielectric solution spraying nozzle of the coating sprayer; and
returning said coating sprayer to a starting position and forming the electric field between the material to be coated and the coating sprayer again, and further polarizing the precursor polarization film to form a piezoelectric/pyroelectric film on the material to be coated.