# US 8,465,661 B2 · Method of processing graphene sheet material and method of manufacturing electronic device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,465,661 B2 - Document ID: US8465661B2 - Status: Granted - Kind: B2 - Application number: 13/228,785 - Filed: 2011-09-09 - Published: 2011-12-29 - Granted: 2013-06-18 - Earliest claimed: 2009-04-21 - Assignees: Fujtsu Limited - Applicants: Koji Asano - Inventors: Koji Asano - Web page: https://patentgrep.com/patent/US8465661B2 ## CPC - C01B 32/194: After-treatment - B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites - B82Y 40/00: Manufacture or treatment of nanostructures - H10P 50/00: Etching of wafers, substrates or parts of devices - H10P 50/242: {of Group IV materials} - C01B 2204/04: Specific amount of layers or specific thickness - H10P 14/3406: {Carbon, e.g. diamond-like carbon} - H10P 14/38: {characterised by treatments done after the formation of the materials} - C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C} - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method of processing a graphene sheet material includes irradiating UV ray to a graphene sheet material in an atmosphere containing a first substance to inactivate an edge of the graphene sheet material by substituting an end group connected to the edge of the graphene sheet material with more stable functional group generated from the first substance, and irradiating UV ray to a surface of the graphene sheet material in an atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side. ## Claims ### Claim 1 A method of processing a graphene sheet material comprising: irradiating UV ray to a graphene sheet material in a first atmosphere containing a first substance to activate the first substance and inactivate an edge of the graphene sheet material by the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side. ### Claim 2 (depends on 1) The method of processing a graphene sheet material according to claim 1, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains. ### Claim 3 (depends on 1) The method of processing a graphene sheet material according to claim 1, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material. ### Claim 4 (depends on 3) The method of processing a graphene sheet material according to claim 3, wherein in removing the graphene sheet, the edge of the graphene sheet material is protected by the functional group from the activated second substance. ### Claim 5 (depends on 3) The method of processing a graphene sheet material according to claim 3, wherein the functional group is F—, CF3—, CF3CF2—, (CF3)2CH—, (CH3)3C—, CH3—, CH3CH2—, (CH3)2CH—, or (CH3)3C—. ### Claim 6 (depends on 1) The method of processing a graphene sheet material according to claim 1, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide and groups containing their mixtures. ### Claim 7 (depends on 1) The method of processing a graphene sheet material according to claim 1, wherein the first atmosphere contains the first substance diluted with an inactive gas. ### Claim 8 (depends on 1) The method of processing a graphene sheet material according to claim 1, wherein the UV ray is a vacuum UV ray. ### Claim 9 (depends on 8) The method of processing a graphene sheet material according to claim 8, wherein the vacuum UV ray is generated by a vacuum UV lamp using at least one kind of material selected from the group consisting of xenon, krypton, argon or krypton chloride. ### Claim 10 (depends on 1) The method of processing a graphene sheet material according to claim 1, wherein the graphene sheet material is a laminate of graphene sheets or partially chemically modified graphene sheets. ### Claim 11 A method of manufacturing an electronic device comprising: irradiating UV ray to a graphene sheet material in a first atmosphere containing a first substance to activate the first substance and inactivate an edge of the graphene sheet material by the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side. ### Claim 12 (depends on 11) The method of manufacturing an electronic device according to claim 11, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains. ### Claim 13 (depends on 11) The method of manufacturing an electronic device according to claim 11, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material. ### Claim 14 (depends on 13) The method of manufacturing an electronic device according to claim 13, wherein the functional group is F—, CF3—, CF3CF2—, (CF3)2CH—, (CH3)3C—, CH3—, CH3CH2—, (CH3)2CH—, or (CH3)3C—. ### Claim 15 (depends on 13) The method of manufacturing an electronic device according to claim 13, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide and groups containing their mixtures. ### Claim 16 (depends on 11) The method of manufacturing an electronic device according to claim 11, wherein the first atmosphere contains the first substance diluted with an inactive gas. ### Claim 17 (depends on 11) The method of manufacturing an electronic device according to claim 11, wherein the UV ray is a vacuum UV ray. ### Claim 18 (depends on 11) The method of manufacturing an electronic device according to claim 11, wherein the vacuum UV ray is generated by a vacuum UV lamp using at least one kind of material selected from the group consisting of xenon, krypton, argon or krypton chloride.