# US 8,465,620 B2 · Hollow anode plasma reactor and method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,465,620 B2 - Document ID: US8465620B2 - Status: Granted - Kind: B2 - Application number: 12/121,047 - Filed: 2008-05-15 - Published: 2008-11-06 - Granted: 2013-06-18 - Earliest claimed: 2001-05-16 - Assignees: Lam Research Corporation - Applicants: David W. Benzing; Babak Kadkhodayan - Inventors: David W. Benzing; Babak Kadkhodayan - Web page: https://patentgrep.com/patent/US8465620B2 ## CPC - H01J 37/3244: {Gas supply means} - H01J 37/32623: {Mechanical discharge control means} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract The plasma processing apparatus includes a plasma chamber, a first electrode, a second electrode, and a plasma containment device. The plasma containment device has a plurality of slots and is electrically coupled to the first electrode. The containment device is configured to confine plasma within an inter-electrode volume while facilitating maximum process gas flow. When plasma is generated by applying electric fields to process gas within the inter-electrode volume, the containment device electrically confines the plasma to the inter-electrode volume without significantly restricting the flow of gas from the inter-electrode volume. ## Claims ### Claim 1 A plasma confinement system comprising: an electrical ground; a containment device coupled to the electrical ground, the containment device acting as a first electrode having a surface facing an interior of the containment device; a process gas source coupled to the containment device; a second electrode having a surface facing the interior of the containment device that is proximate and substantially parallel to the first electrode; a first volume disposed between the first and the second electrodes; and a second volume disposed next to the first volume, wherein the first volume and the second volume are separated by one side adjacent to both the first volume and the second volume; wherein the containment device comprises the one side, the containment device substantially enclosing the first volume and electrically coupled to the electrical ground, the one side comprising at least one channel that allows gas to pass between the first volume and second volume, wherein the at least one channel is configured to maintain a pressure level of at least one of the first volume and the second volume. ### Claim 2 (depends on 1) The plasma confinement system of claim 1 wherein the at least one channel is configured to minimize a pressure loss between the first volume and the second volume. ### Claim 3 (depends on 2) The plasma confinement system of claim 2 further comprising a vacuum pump coupled with the second volume, wherein the second volume comprises an outer chamber volume that is coupled with the vacuum pump through a vacuum line, wherein the vacuum pump is configured to remove gas from the plasma confinement system. ### Claim 4 (depends on 1) The plasma confinement system of claim 1 wherein the containment device comprises electrically conductive portions that substantially confine electric fields to the first volume. ### Claim 5 (depends on 1) The plasma confinement system of claim 1 further comprising a supply line configured to channel the process gas into the first volume from the process gas source. ### Claim 6 (depends on 1) The plasma confinement system of claim 1 wherein the at least one channel is configured to equalize a pressure between the first volume and the second volume. ### Claim 7 A plasma chamber system comprising: a process gas source; a shroud that receives process gas from the process gas source, wherein the shroud comprises a first electrode; an inter-electrode volume that is disposed within the shroud, wherein the first electrode has a surface facing an interior of the inter-electrode volume; a second electrode having a surface facing the interior of the inter-electrode volume that is proximate and substantially parallel to the first electrode, wherein the inter-electrode volume is disposed between the first electrode and the second electrode; a second volume abutting the interelectrode volume; and at least one channel in the shroud that allows gas to pass between the inter-electrode volume and second volume, wherein the at least one channel is configured to minimize a pressure loss between the inter-electrode volume and the second volume. ### Claim 8 (depends on 7) The system of claim 7 wherein the shroud substantially terminates electric fields formed within the inter-electrode volume to prevent the electric fields from penetrating the second volume. ### Claim 9 (depends on 7) The system of claim 7 wherein the shroud comprises electrically conductive portions that substantially confine electric fields to the inter-electrode volume. ### Claim 10 (depends on 7) The system of claim 7 wherein the shroud encloses the inter-electrode volume on three sides. ### Claim 11 (depends on 10) The system of claim 10 wherein the first electrode comprises one side of the shroud and protrudes into the inter-electrode volume. ### Claim 12 (depends on 7) The system of claim 7 wherein the second volume comprises an outer electrode volume. ### Claim 13 (depends on 7) The system of claim 7 further comprising a vacuum pump that removes the process gas. ### Claim 14 (depends on 13) The system of claim 13 further comprising a vacuum line connecting the vacuum pump with second volume. ### Claim 15 A plasma chamber apparatus comprising: a gas source; a first electrode; a second electrode that is proximate to and substantially parallel to the first electrode; an inter-electrode volume between an inner surface of the first electrode and an inner surface of the second electrode that receives gas from the gas source; a second volume separate from but connected with the interelectrode volume; wherein the first electrode comprises a wall that separates the inter-electrode volume from the second volume, wherein the inter-electrode volume is adjoining the second volume at the wall; at least one channel through the wall that allows gas to pass between the inter-electrode volume and second volume, wherein the at least one channel is configured to maintain a pressure level at the inter-electrode volume or the second volume. ### Claim 16 (depends on 15) The plasma chamber apparatus of claim 15 wherein the wall comprising at least one channel substantially terminates electric fields formed within the inter-electrode volume from penetrating the second volume. ### Claim 17 (depends on 15) The plasma chamber apparatus of claim 15 wherein the wall comprises an outer edge of the first electrode that projects about the inter-electrode volume. ### Claim 18 (depends on 15) The plasma chamber apparatus of claim 15 wherein the first electrode comprises a shroud that at least partially encloses the inter-electrode volume. ### Claim 19 (depends on 15) The plasma chamber apparatus of claim 15 wherein the second volume comprises an outer electrode volume. ### Claim 20 (depends on 19) The plasma chamber apparatus of claim 19 further comprising a vacuum pump connected with the outer electrode volume through a vacuum line, wherein the vacuum pump is configured to remove gas from the plasma chamber apparatus. ### Claim 21 (depends on 15) The plasma chamber apparatus of claim 15 wherein the wall comprises a partition between the inter-electrode volume and the second volume.