# US 8,464,741 B2 · Flow control method for multizone gas distribution

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- Number: US 8,464,741 B2
- Document ID: US8464741B2
- Status: Granted
- Kind: B2
- Application number: 13/194,454
- Filed: 2011-07-29
- Published: 2011-11-17
- Granted: 2013-06-18
- Earliest claimed: 2008-01-14
- Assignees: Tokyo Electron Limited
- Applicants: Stefan Sawusch
- Inventors: Stefan Sawusch
- Web page: https://patentgrep.com/patent/US8464741B2

## CPC

- F17D 5/00: Protection or supervision of installations (arrangements for protecting foundations E02D31/00; protecting pipes from damage or internal or external wear F16L57/00, against corrosion and scale F16L58/00; investigation of the fluid-tightness of structures G01M3/00)
- Y10T 137/0379: By fluid pressure
- Y10T 137/2501: Dividing and recombining flow
- Y10T 137/2529: With electrical controller
- Y10T 137/2562: Dividing and recombining
- Y10T 137/7759: Responsive to change in rate of fluid flow
- Y10T 137/7761: Electrically actuated valve
- Y10T 137/877: With flow control means for branched passages
- F17D: PIPE-LINE SYSTEMS; PIPE-LINES (pumps or compressors F04; fluid dynamics F15D; valves or the like F16K; pipes, laying pipes, supports, joints, branches, repairing, work on the entire line, accessories F16L; steam traps or the like F16T; fluid-pressure electric cables H01B9/06)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method of supplying and controlling the flow of a process gas to a process chamber. The method includes initiating a known flow rate of a process gas to a process chamber, dividing the known flow rate of the process gas into a first flow of the process gas at a first flow rate and a second flow of the process gas at a second flow rate, measuring a first pressure associated with the first flow of the process gas, measuring a second pressure associated with the second flow of the process gas, and controlling the first flow rate and the second flow rate according to a target flow condition by adjusting a first conductance of the first flow of the process gas and a second conductance of the second flow of the process gas and monitoring the first pressure and the second pressure.

## Claims

### Claim 1

A method of supplying a process gas to a process chamber and controlling flow conditions, comprising:
initiating a known flow rate of a process gas to a process chamber;
dividing said known flow rate of said process gas into a first flow of said process gas at a first flow rate and a second flow of said process gas at a second flow rate;
measuring a first pressure associated with said first flow of said process gas;
measuring a second pressure associated with said second flow of said process gas;
calculating a first correlation of said flow conditions between the sum of said first pressure and said second pressure and the sum of said first flow rate and said second flow rate;
calculating a second correlation of said flow conditions between a ratio of said first flow rate to said second flow rate and a ratio of said first pressure to said second pressure;
controlling said first flow rate and said second flow rate according to a target flow condition by adjusting a first conductance of said first flow of said process gas and a second conductance of said second flow of said process gas; and
determining a fault condition, an erroneous fault condition or a service condition associated with a variation in said flow conditions during the supply of said process gas to said process chamber by monitoring said first pressure, or said second pressure, or a combination of said first pressure and said second pressure.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
determining said first flow rate or said second flow rate or both by using said first correlation, said second correlation, said measurement of said first pressure and said measurement of said second pressure.

### Claim 3 (depends on 2)

The method of claim 2, wherein said determining said first flow rate comprises:
computing the ratio of said first pressure to said second pressure,
determining a flow ratio from said second correlation using the ratio of said first pressure to said second pressure,
computing the sum of said first pressure and said second pressure,
determining a total flow rate using the sum of said first pressure and said second pressure, and
computing said first flow rate using said determined flow ratio and said determined total flow rate or said known flow rate.

### Claim 4 (depends on 1)

The method of claim 1, wherein said target flow condition comprises a target ratio of said first flow rate to said known flow rate or a target ratio of said second flow rate to said known flow rate or a target ratio of said first flow rate to said second flow rate, and wherein said controlling said first flow rate and said second flow rate comprises comparing said ratio of said first pressure to said second pressure with said target ratio.

### Claim 5 (depends on 1)

The method of claim 1, wherein said determining said fault condition comprises correlating a temporal variation in said first pressure or said second pressure or said combination of said first pressure and said second pressure with a variation in said known flow rate.

### Claim 6 (depends on 1)

The method of claim 1, wherein said determining said erroneous fault condition comprises correlating a substantially small temporal variation in said first pressure or said second pressure or said combination of said first pressure and said second pressure with a variation in said known flow rate.

### Claim 7 (depends on 1)

The method of claim 1, wherein said determining said service condition comprises detecting a gradual temporal variation in said first pressure or said second pressure or said combination of said first pressure and said second pressure while not varying said known flow rate.