Providing electron beam proximity effect correction by simulating write operations of polygonal shapes

A computer-based system for facilitating electron beam writing, the system comprising:

• a dosage modulation module for proximity effect correction, the dosage modulation module performing the following functions:
• create a plurality of polygons, each polygon having a respective dose applied to a respective set of pixels, and further each polygon occupying a respective virtual layer;
• iteratively apply ones of the layers to correct a simulation writing error;
• and
• save the applied ones of the layers to a data structure;
• and
• a non-transitory computer-readable medium storing the data structure.

A non-transitory computer readable medium tangibly recording executable instructions for performing proximity effect correction, the non-transitory computer readable medium comprising:

• code to perform a first write simulation operation of a first shape;
• code to calculate an error for the first shape;
• code to apply a first polygon in a first virtual layer to the first shape, wherein the first virtual layer overlays the first shape, the polygon defining a first set of pixels with a first dosage, the first polygon generated to address the error;
• code to create a data structure that includes the first shape and the first virtual layer;
• and
• code to output the data structure in a computer-readable file.