Polycrystalline group III metal nitride with getter and method of making

A polycrystalline gallium-containing group III metal nitride material, comprising:

• a plurality of grains of a crystalline gallium-containing group III metal nitride;
• the plurality of grains having an average grain size in a range of from about 10 nanometers to about 1 millimeter and defining a plurality of grain boundaries;
• and
• the crystalline gallium-containing group III metal nitride having:
• an atomic fraction of a gallium-containing group III metal in a range of from about 0.49 to about 0.55, the metal being selected from at least one of aluminum, indium, and gallium;
• and
• an oxygen content in the form of a gallium-containing group III metal oxide or a substitutional impurity within the crystalline gallium-containing group III metal nitride less than about 10 parts per million (ppm);
• and
• a plurality of inclusions within at least one of the plurality of grain boundaries and the plurality of grains, the plurality of inclusions comprising a getter, the getter constituting a distinct phase from the crystalline gallium-containing group III metal nitride and being incorporated into the polycrystalline gallium-containing group III metal nitride material at a level greater than about 200 parts per million.