Method for providing a perpendicular magnetic recording transducer using a low energy mill
AssigneeWestern Digital (Fremont), LLC
InventorsWeimin Si, Yun-Fei Li, Ying Hong
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Abstract
A method for fabricating magnetic transducer is described. The method includes providing a main pole having a bottom and a top wider than the bottom. The method further includes performing a high energy ion mill at an angle from a normal to the to of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method also includes performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.
Claims15
A method for fabricating a magnetic recording transducer having an air-bearing surface (ABS) location comprising:
- providing a main pole having a bottom and a top wider than the bottom;
- performing a high energy ion mill at an angle of greater than zero degrees from a normal to the top of the main pole and at a first energy, the high energy ion mill having a first component in a first direction substantially perpendicular to the ABS location, the high energy ion mill removing a portion of the top of the main pole, exposing a top bevel surface for the main pole;
- and
- performing a low energy ion mill at second energy and a glancing angle from the top bevel surface, the glancing angle being not more than fifteen degrees, the second energy being less than the first energy, the low energy ion mill having a second component along the first direction;
- depositing a nonmagnetic gap.
A method for fabricating a magnetic recording transducer comprising:
- providing a main pole having a bottom and a top wider than the bottom;
- providing a mask distal from an air-bearing surface (ABS) location before performing a high energy ion mill;
- performing the high energy ion mill at an angle from a normal to the top of the main pole and at a first energy, the high energy ion mill removing a portion of the to of the main pole, exposing a top bevel surface for the main pole;
- removing the mask after performing the high energy ion mill and before performing a low angle ion mill;
- performing the low energy ion mill at a second energy and a glancing angle from the to bevel surface, the glancing angle being not more than fifteen degrees, the second energy being less than the first energy;
- and
- depositing a nonmagnetic gap.
A method for fabricating a magnetic recording transducer comprising:
- providing a main pole having a bottom and a top wider than the bottom;
- providing a bevel capping layer on the top of the main pole, the bevel capping layer being nonmagnetic;
- providing a bottom antireflective coating (BARC) on the bevel capping layer;
- providing a mask on the BARC distal from an air-bearing surface (ABS) location;
- performing a high energy ion mill at an angle from a normal to the top of the main pole and at a first energy after the mask is provided, the high energy ion mill removing a portion of the top of the main pole proximate to the ABS, a portion of the BARC proximate to the ABS, and a portion of the bevel capping layer proximate to the ABS, the high energy ion mill exposing a top bevel surface of the main pole, the first energy being greater than seven hundred electron volts, the angle being at least thirty-five degrees and not more than fifty-five degrees;
- removing the mask and the BARC after the step of performing the high energy ion mill;
- performing a low energy ion mill at second energy and a glancing angle from the top bevel surface, the glancing angle being at least ten and not more than fifteen degrees, the second energy being less than two hundred electron volts;
- depositing a nonmagnetic gap;
- and
- providing a wrap-around shield on the nonmagnetic gap.
Dependencies are inferred from the claim text.