Glass substrate processing device using laser beam

A processing device configured to irradiate a laser beam onto a glass substrate for processing the glass substrate, comprising:

• a work table disposing a glass substrate as a processing target thereon;
• a laser beam output section configured to output a laser beam;
• a multi-spot focus section configured to receive the laser beam, the multi-spot focus section configured to split and to focus the laser beam inputted therein into a plurality of beam focus spots;
• a rotation drive mechanism configured to rotate the plurality of beam focus spots about a single center axis arranged in a center of the plurality of beam focus spots;
• an optical system configured to guide the laser beam outputted from the laser beam output section to the multi-spot focus section;
• a laser beam scan section configured to move all the plurality of beam focus spots rotating about the single center axis in a desired direction within a predetermined range of a plane arranged along a surface of the glass substrate;
• a diffractive optical element configured to split the laser beam inputted therein through the optical system into a plurality of laser beam fluxes;
• and
• a collective lens configured to concentrate the plurality of laser beam fluxes split by the diffractive optical element,
• the rotation drive mechanism configured to rotate the diffractive optical element.