Method and system for providing a perpendicular magnetic recording pole with a multi-layer side gap

A method for fabricating a magnetic transducer having an intermediate layer, the method comprising:

• providing a trench in the intermediate layer, the trench having a profile and a location corresponding to a pole of the magnetic transducer, the intermediate layer being nonmagnetic;
• chemical vapor depositing (CVDing) a first Ru layer, at least a portion of the first Ru layer residing in the trench;
• depositing at least one magnetic layer on the first Ru layer;
• planarizing the magnetic transducer to remove a first portion of the first Ru layer external the trench, to remove a first portion of the at least one magnetic layer external to the trench, thereby leaving the pole and a second portion of the first Ru layer in the trench;
• removing a portion of the intermediate layer adjacent to the pole;
• atomic layer depositing a layer of alumina after the portion of the intermediate layer is removed;
• CVDing a second Ru layer after the layer of alumina is deposited, a total thickness of the second Ru layer plus the layer of alumina being thicker than the first Ru layer;
• depositing a magnetic shield layer on the second Ru layer;
• planarizing the magnetic recording transducer to remove a portion of the magnetic shield layer;
• ion beam etching the magnetic recording transducer, thereby exposing the pole, a remaining portion of the high permeability layer forming a side shield;
• providing a gap on the pole, a portion of the side gap, and a portion of the side shield;
• and
• providing a top shield.