Infrared emitter arrangement for high-temperature vacuum processes
AssigneeHeraeus Noblelight GmbH
InventorSven Linow
Life of this patent
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Abstract
An infrared emitter has at least one emitter tube (11) having pinched sections at each of its ends. At least one opaque tube portion (12) is arranged in a manner welded in alignment with the at least one emitter tube. The infrared emitter may be installed in a processing chamber (21).
Claims10
An infrared emitter, comprising at least one emitter tube having pinched sections at each of its ends and a coil disposed therein, and at least one opaque tube section arranged welded in alignment with the at least one emitter tube, the entire coil being longitudinally spaced apart from the at least one opaque tube section, and wherein at least one of the pinched sections is entirely spaced apart from the at least one emitter tube.
Dependencies are inferred from the claim text.