Electrochromic devices

A method of fabricating an electrochromic window, the method comprising:

• sequentially depositing layers on a glass substrate while in a substantially vertical orientation at multiple deposition stations within a single pass integrated vacuum deposition system to fabricate an entirely inorganic and solid state electrochromic device having a low level of electric short related defects, visible during tinting of the electrochromic device;
• depositing a tungsten oxide electrochromic layer while the glass substrate is in a first deposition station of the multiple deposition stations;
• depositing a nickel tungsten oxide counter electrode layer while the glass substrate is in a second deposition station of the multiple deposition stations to form a stack of the electrochromic device including the electrochromic layer and the counter electrode layer;
• depositing lithium while the glass substrate is in a third deposition station of the multiple deposition stations;
• and
• depositing a transparent conductive oxide while the glass substrate is in a fourth deposition station of the multiple deposition stations,
• wherein the glass substrate is in the substantially vertical orientation during translational movement between the multiple stations depositing the layers on the glass substrate within the integrated vacuum deposition system,
• wherein the glass substrate does not leave the integrated vacuum deposition system at any time during the sequential deposition of the electrochromic layer and the counter electrode layer, and
• wherein the glass substrate has a size of at least 20×20 inches and up to about 80 inches by 120 inches.