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AssigneeSharp Kabushiki Kaisha
InventorsTokio Taguchi, Shun Ueki, Kozo Nakamura, Kazuhiko Tsuda
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A method for making a stamper which has an uneven surface pattern, in which unit structures are arranged in x and y directions at respective periods that are both shorter than the shortest wavelength of an incoming light ray, on the surface of a substrate and satisfies the following Inequality (1): Λ x , y λ min < 1 ni + ni · sin θ i max ( 1 ) where λmin is the shortest wavelength of the incoming light ray, θimax is the largest angle of incidence of the incoming light ray, ni is the refractive index of an incidence medium, Λx is the period of the uneven surface pattern in the x direction, and Λy is the period of the pattern in the y direction. As a result, diffraction of short-wave light components can be reduced in a broad wavelength range.
A method of making a stamper that has a fine uneven surface structure, the method comprising the steps of:
A method of making an antireflective member using a stamper, the method comprising the steps of:
Dependencies are inferred from the claim text.