Spin coating modeling
AssigneeKLA-Tencor Corporation
InventorsJohn S. Graves, Mark D. Smith, Stewart A. Robertson
Life of this patent
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Abstract
A method for setting processing parameters for fabricating an integrated circuit, by creating a mathematical model of a spin coated surface of a material over a non-flat substrate surface, where the mathematical model includes, a smoothing algorithm, where the smoothing algorithm uses as inputs only, a nominal thickness of the spin coated surface, a minimum thickness of the spin coated surface, and an interaction length, and a constraint that the spin coated surface cannot intersect the substrate surface, solving the mathematical model to determine the spin coated surface, and using the modeled spin coated surface to set the processing parameters for fabricating the integrated circuit.
Claims10
A method for setting processing parameters for fabricating an integrated circuit, the method comprising the steps of:
- creating a mathematical model of a spin coated surface of a material over a non-flat substrate surface, where the mathematical model includes,
- a smoothing algorithm, where the smoothing algorithm uses a inputs only,
- a nominal thickness of the spin coated surface,
- a minimum thickness of the spin coated surface, and
- an interaction length, and
- a constraint that the spin coated surface cannot intersect the substrate surface,
- solving the mathematical model to determine the spin coated surface, and
- using the modeled spin coated surface to set the processing parameters for fabricating the integrated circuit,
- wherein the smoothing algorithm is given by,
- ∂
- H
-
- (
- x
- ,
- y
- )
- ∂
- t
- =
- D
-
- (
- ∂
- 2
-
- H
-
- (
- x
- ,
- y
- )
- ∂
- x
- 2
- +
- ∂
- 2
-
- H
-
- (
- x
- ,
- y
- )
- ∂
- y
- 2
- )
- ,
- where t is time, H(x,y) is the substrate surface plus the nominal thickness, and D is diffusion coefficient.
A method for setting processing parameters for fabricating an integrated circuit, the method comprising the steps of:
- creating a mathematical model of a spin coated surface of a material over a non-flat substrate surface, where the mathematical model includes,
- a smoothing algorithm, where the smoothing algorithm uses as inputs only,
- a nominal thickness of the spin coated surface,
- a minimum thickness of the spin coated surface, and
- an interaction length, and
- a constraint that the spin coated surface cannot intersect the substrate surface,
- solving the mathematical model to determine the spin coated surface, and
- using the modeled spin coated surface to set the processing parameters for fabricating the integrated circuit,
- wherein the smoothing algorithm is given by,
- ∂
- H
-
- (
- x
- ,
- y
- )
- ∂
- t
- =
- D
-
- (
- ∂
- 2
-
- H
-
- (
- x
- ,
- y
- )
- ∂
- x
- 2
- +
- ∂
- 2
-
- H
-
- (
- x
- ,
- y
- )
- ∂
- y
- 2
- )
- +
- P
- +
- r
- ·
- min
-
- [
- 0
- ,
- M
-
- (
- x
- ,
- y
- )
- -
- H
-
- (
- x
- ,
- y
- )
- ]
- 2
-
- V
- =
- ∫
- ∫
- A
-
- H
-
- (
- x
- ,
- y
- )
-
- ⅆ
- A
- ,
- where t is time, H(x,y) is the substrate surface plus the nominal thickness, P is a Lagrange multiplier, r is a penalty coefficient that can be adjusted to satisfy the minimum thickness, M(x,y) is the substrate surface plus the minimum thickness, A is area, V is volume, and D is diffusion coefficient.
Dependencies are inferred from the claim text.