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US 8,428,401 B2Granted
On-chip optical waveguide
AssigneeTelefonaktiebolaget L M Ericsson (publ)
InventorLars Tilly
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Abstract
Systems and methods according to these exemplary embodiments provide for on-chip optical waveguides, methods of making on-chip optical waveguides, and devices including such on-chip optical waveguides. A dielectric layer formed from, e.g., transparent spacer dielectric material, forms a waveguide core and can be surrounded or substantially surrounded by a metal cladding layer. The metal cladding layer can be formed in the chip using backend metallization techniques, e.g., Damascene processing.
Claims9
An on-chip optical waveguide comprising:
- a substrate;
- a dielectric layer disposed on top of the substrate, wherein said dielectric layer is patterned to form a core of said on-chip optical waveguide;
- side walls of said optical waveguide which are disposed adjacent to said core and which are made of metal;
- a first metallization layer disposed on said dielectric layer and on the side walls;
- a second metallization layer disposed on a lower surface of said dielectric layer and on a first lower surface portion of the side walls, wherein said side walls, said first metallization layer and said second metallization layer form a cladding layer of said on-chip optical waveguide around said core;
- an optical transmitter device formed in said substrate and configured to transmit light into said dielectric layer via a reflector arrangement;
- and
- an optical receiver device formed in said substrate and configured to receive said light from said optical waveguide formed from said dielectric layer via said reflector arrangement.
5 more elements
Dependencies are inferred from the claim text.