Inspecting method, inspecting system, and method for manufacturing electronic devices

A computerized method for classifying defects, comprising:

• displaying all of a plurality of classified defect images, which have been automatically classified, respectively in different regions in one of a plurality of classified categories based upon calculated feature quantities of each of the defect images, wherein all of the defect images and all of the categories are simultaneously displayed on a same display screen with the defect images respectively grouped in different ones of the categories based upon the calculated feature quantities for each defect,
• in the event of a need to reclassify one of the defect images, moving said one defect image from a previously classified category to another classified category to correct the category of the moved defect image;
• and
• associating classified category information of said another classified category with data of said displayed moved defect image.

An apparatus for classifying defects, comprising:

• a feature calculating unit which is configured to calculate feature quantities of a plurality of defect images which are obtained by imaging defects on a sample using an image detecting device;
• an automatic defect classifying unit configured to automatically classify each of said defect images respectively into one of a plurality of categories based on a predetermined function, by using information on said calculated feature quantities;
• a display unit configured to display all of said classified defect images, which have been automatically classified, respectively in different regions in each classified category based upon the calculated feature quantities of each of the defect images, wherein all of the defect images and all of the categories are simultaneously displayed on a same display screen with the defect images respectively grouped in different ones of the categories based upon the calculated feature quantities for each defect;
• a moving unit which, in the event of a need to reclassify one of the defect images, is configured to move said one defect image from a previously classified category to another classified category to correct the category of the moved defect image;
• and
• an associating unit to associate classified category information of said another classified category with data of said displayed moved defect image.